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Journal of Nanomaterials
Volume 2009, Article ID 204281, 8 pages
http://dx.doi.org/10.1155/2009/204281
Research Article

Strength and Fracture Resistance of Amorphous Diamond-Like Carbon Films for MEMS

1Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218, USA
2Aerospace Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA

Received 6 December 2008; Accepted 22 May 2009

Academic Editor: Rakesh Joshi

Copyright © 2009 K. N. Jonnalagadda and I. Chasiotis. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

K. N. Jonnalagadda and I. Chasiotis, “Strength and Fracture Resistance of Amorphous Diamond-Like Carbon Films for MEMS,” Journal of Nanomaterials, vol. 2009, Article ID 204281, 8 pages, 2009. https://doi.org/10.1155/2009/204281.