Strength and Fracture Resistance of Amorphous Diamond-Like Carbon Films for MEMS

<table>Specimen model showing the boundary conditions and the finite element mesh in the vicinity of the crack tip used in numerical calculations of the stress intensity factors.</table>

Journal of Nanomaterials

fig3

Figure 3

Figure 3: Strength and Fracture Resistance of Amorphous Diamond-Like Carbon Films for MEMS 