Mechanical Researches on Young's Modulus of SCS Nanostructures

Figure 3

SEM views of the MEMS tensile-testing chip. The structures of beams and combs are shown. Inset is the enlarged view of the sample, seen through the electron beam window. The <110>-oriented SCS thin film is connected on its both ends to the supporting structures. (Reprinted with permission from [12]. 2008 IEEE).