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Journal of Nanomaterials
Volume 2009, Article ID 876561, 5 pages
Research Article

Near-Edge X-Ray Absorption Fine Structure of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Films Prepared by Pulsed Laser Deposition

1Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580, Japan
2Kyushu Synchrotron Light Research Center, 8-7 Yayoigaoka, Tosu, Saga 841-0005, Japan
3Department of Aeronautics and Astronautics, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan

Received 17 January 2009; Revised 17 January 2009; Accepted 19 February 2009

Academic Editor: Rakesh Joshi

Copyright © 2009 Shinya Ohmagari et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The atomic bonding configuration of ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films prepared by pulsed laser ablation of graphite in a hydrogen atmosphere was examined by near-edge X-ray absorption fine structure spectroscopy. The measured spectra were decomposed with simple component spectra, and they were analyzed in detail. As compared to the a-C:H films deposited at room substrate-temperature, the UNCD/a-C:H and nonhydrogenated amorphous carbon (a-C) films deposited at a substrate-temperature of 5 5 0 āˆ˜ C exhibited enhanced šœ‹ āˆ— and šœŽ āˆ— C ā‰” C peaks. At the elevated substrate-temperature, the šœ‹ āˆ— and šœŽ āˆ— C ā‰” C bonds formation is enhanced while the šœŽ āˆ— C–H and šœŽ āˆ— C–C bonds formation is suppressed. The UNCD/a-C:H film showed a larger šœŽ āˆ— C–C peak than the a-C film deposited at the same elevated substrate-temperature in vacuum. We believe that the intense šœŽ āˆ— C–C peak is evidently responsible for UNCD crystallites existence in the film.