Near-Edge X-Ray Absorption Fine Structure of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Films Prepared by Pulsed Laser Deposition

Table 1

Comparison of the peak positions and FWHMs of the decomposed component spectra of the UNCD/a-C:H films deposited at 𝑇_s=550^∘C and 𝑃_H2=53.3  Pa, a-C films deposited at 𝑇_s=550^∘C in vacuum, a-C:H films deposited at 𝑇_s= RT and 𝑃_H2=53.3 Pa in this study, and carbon films in previous reports.

	𝜋1^∗C=C (eV)	𝜋2^∗C=C (eV)	𝜎^∗C–H (eV)	𝜋^∗ C≡C (eV)	𝜎^∗C–C (eV)	𝜎^∗C=C (eV)	𝜎^∗ C≡C (eV)
UNCD/a-C:H
position	284.87		286.22	287.27	288.42	292.87	303.81
FWHM	1.48		1.50	1.30	1.30
a-C
position	284.65	285.70		287.27	288.42	292.87	303.81
FWHM	1.76	1.70		1.64	1.35
a-C:H
position	284.73		286.30	287.22	288.25	292.65	303.81
FWHM	1.48		1.10	1.00	1.55
			<Previous reports>
	285^(a) [26]	286^(b) [15]	287.5^(a) [26]		289.3^(c) [24]	292.7^(d) [22]
position	284^(b) [27]		287^(b) [27]
	284.6^(b) [15]

^(a)UNCD/a-C:H, ^(b)a-C, ^(c)nanocrystalline diamond (NCD), and ^(d)amorphous nitrogenated carbon.