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Journal of Nanomaterials
Volume 2011, Article ID 510237, 7 pages
Research Article

Fabrication and Optical Property of Periodic Nanostructures Patterned by the Polystyrene Microsphere Templates

Advanced Materials Laboratory, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

Received 28 June 2011; Revised 31 August 2011; Accepted 13 September 2011

Academic Editor: Yanqiu Zhu

Copyright © 2011 Shutian Chen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Regular arrays of nanostructures were fabricated by glancing angle sputter deposition onto self-assembled close-packed arrays of 200 nm diameter, 500 nm diameter, and 1 μm diameter polystyrene microspheres, respectively. The morphology of the nanostructures could be modulated by the variation of the sputtering power of Ti target and the size of polystyrene microspheres templates. Accordingly, the performance of reflection which was dependent on the morphology of nanostructures could be tuned by optimizing the parameters. The anisotropic morphology of nanoflakes achieved by adjusting the sputtering power of Ti target could generate the anisotropism of reflectance. With the increase of the PS sphere size, the anisotropism of nanostructures weakened; however, they exhibited excellent antireflection effects by creating a smaller gradient of refractive index.