Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance
Figure 2
Bright-field TEM images and selected area diffraction of CrNx coatings deposited at = 90 mm. The view directions are normal to the coating surface. (a) Samples prepared without ion source assistance, (b) with ion source assistance.