Structural and Mechanical Properties of CrN<sub>x</sub> Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance

<table>Deposition rate as a function of the <svg height="16.450001" id="M27" style="vertical-align:-3.39069pt" version="1.1" viewbox="0 0 18.85 16.450001" width="18.85" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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h-35l1 26q39 4 76 13.5t58.5 17t27.5 7.5q16 0 9 -26zM387 375q-11 11 -38.5 20t-51.5 9q-45 0 -79 -23q-46 -32 -77.5 -107.5t-31.5 -143.5q0 -40 9.5 -58.5t23.5 -18.5q40 0 113.5 70t99.5 118z" id="x1D451"></path></g>
<g transform="matrix(.012,-0,0,-.012,9.5,16.25)"><path d="M319 325l-25 -7q-33 99 -103 99q-29 0 -47 -19.5t-18 -49.5t22 -49.5t62 -36.5q63 -26 95 -57t32 -79q0 -64 -50 -101t-115 -37q-35 0 -67.5 10.5t-46.5 23.5q-5 11 -11 51t-6 67l27 5q14 -53 46.5 -88.5t75.5 -35.5q29 0 50 19.5t21 50.5t-19.5 51.5t-59.5 39.5
q-28 12 -46 22.5t-38.5 27t-30.5 38.5t-10 49q0 54 42.5 92t109.5 38q48 0 88 -18q6 -15 13 -50.5t9 -55.5z" id="x73"></path></g><g transform="matrix(.012,-0,0,-.012,13.807,16.25)"><path d="M319 325l-25 -7q-33 99 -103 99q-29 0 -47 -19.5t-18 -49.5t22 -49.5t62 -36.5q63 -26 95 -57t32 -79q0 -64 -50 -101t-115 -37q-35 0 -67.5 10.5t-46.5 23.5q-5 11 -11 51t-6 67l27 5q14 -53 46.5 -88.5t75.5 -35.5q29 0 50 19.5t21 50.5t-19.5 51.5t-59.5 39.5
q-28 12 -46 22.5t-38.5 27t-30.5 38.5t-10 49q0 54 42.5 92t109.5 38q48 0 88 -18q6 -15 13 -50.5t9 -55.5z" id="x73"></path></g>
</svg> of the CrN<sub>x</sub> coatings.</table>

Journal of Nanomaterials

fig3

Figure 3

Figure 3: Structural and Mechanical Properties of CrN<sub>x</sub> Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance 

Figure 3 | Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance 