810879.fig.002a
(a)
810879.fig.002b
(b)
810879.fig.002c
(c)
810879.fig.002d
(d)
Figure 2: (a) HRTEM image of R u O 𝑥 nanolayer; (b) atomic concentration profiles by EDX from TEM image (a); (c) HRTEM image of RuOx nanocrystals at PDA 850°C; (d) atomic concentration profiles by EDX from TEM image (c) in an n–Si/SiO2/HfO2/ R u O 𝑥 /Al2O3/Pt structure. The beam positions are indicated as shown in the HRTEM images.