Performance of Silicon Nanowire Solar Cells with Phosphorus-Diffused Emitters

Figure 1

Schematic illustration of the fabrication process for preparing Si NW arrays-based solar cells. (a) Initial p-type silicon wafer. (b) Formation of Vertical Si NW arrays on the wafer. (c) Formation of a spatially uniform n-type emitter by phosphorus diffusion. (d) Formation of electrode on the rear and front surfaces. (e) Planar schematic of the device.