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Journal of Nanomaterials
Volume 2012, Article ID 539657, 8 pages
Research Article

The Effect of Mg Dopant and Oxygen Partial Pressure on Microstructure and Phase Transformation of Z n T i O 𝟑 Thin Films

1Department of Mechanical Engineering, National Pingtung University of Technology & Science, Pingtung 91201, Taiwan
2Department of Materials Engineering, National Pingtung University of Technology & Science, Pingtung 91201, Taiwan

Received 13 October 2011; Revised 2 December 2011; Accepted 3 December 2011

Academic Editor: Fathallah Karimzadeh

Copyright © 2012 Lay Gaik Teoh et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Mg-doped zinc titanate (ZnTiO3) films were prepared using RF magnetron sputtering. Subsequent annealing of the as-deposited films was performed at a temperature ranging from 600 to 9 0 0 C for 2 hours with a heating rate of 5 C/min in air. It was found that the as-deposited films were amorphous and contained 2.77 at.% magnesium. This was further confirmed by the onset of crystallization that took place at annealing temperatures of 6 0 0 C. The results showed that single Zn2Ti3O8 phase was existed at 6 0 0 C. When annealing is at 7 0 0 C, the results revealed that mainly a hexagonal ZnTiO3 phase accompanying a Zn2Ti3O8 minor phase was observed. When annealing is at 9 0 0 C, the results showed that single hexagonal ZnTiO3 phase is stable at 9 0 0 C. It means that ZnTiO3 phase containing no Mg is unstable at 9 0 0 C and is decomposed from hexagonal ZnTiO3 to cubic Zn2TiO4 and rutile TiO2 at 9 0 0 C. In addition, the effect of oxygen partial pressure for the films deposited on the phase transformations and microstructures of zinc titanites thin film was investigated.