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Journal of Nanomaterials
Volume 2012 (2012), Article ID 539657, 8 pages
http://dx.doi.org/10.1155/2012/539657
Research Article

The Effect of Mg Dopant and Oxygen Partial Pressure on Microstructure and Phase Transformation of Z n T i O 𝟑 Thin Films

1Department of Mechanical Engineering, National Pingtung University of Technology & Science, Pingtung 91201, Taiwan
2Department of Materials Engineering, National Pingtung University of Technology & Science, Pingtung 91201, Taiwan

Received 13 October 2011; Revised 2 December 2011; Accepted 3 December 2011

Academic Editor: Fathallah Karimzadeh

Copyright © 2012 Lay Gaik Teoh et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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