Metal-Catalyst-Free Synthesis and Characterization of Single-Crystalline Silicon Oxynitride Nanowires

Figure 4

(a) SEM image of etched silicon wafer after the high-temperature handling at 1100°C; (b) EDS spectrum acquired from the pit marked in (a); (c), (d), and (e) schematic growth process of the crystalline SiO_xN_y nanowires.