Size-Dependent Dynamic Behavior of a Microcantilever Plate

Table 1

The comparison of analytical and DQ solution for deflection on 𝑦=25𝜇m.

	Static bending deflection (10^−8 m)
Position x	12.5 𝜇m	25 𝜇m	37.5 𝜇m	50 𝜇m
Analytical solution	5.214	14.925	24.051	32.014
DQ solution	5.171	14.805	23.845	31.720
Error %	0.827	0.809	0.858	0.919