Research Article

Effect of the on/off Cycling Modulation Time Ratio of C 2 H 2 / S F 6 Flows on the Formation of Geometrically Controlled Carbon Coils

Figure 3

The magnified FESEM images showing the surface morphologies for (a) sample A, (b) sample B, and (c) sample C.
908961.fig.003a
(a)
908961.fig.003b
(b)
908961.fig.003c
(c)