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Journal of Nanomaterials
Volume 2012, Article ID 914184, 6 pages
http://dx.doi.org/10.1155/2012/914184
Research Article

Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited on c-Plane Sapphire

1Department of Materials Science and Engineering, I-Shou University, Kaohsiung 84001, Taiwan
2Department of Electrophysics, National Chiao Tung University, Hsinchu 300, Taiwan

Received 16 November 2011; Accepted 13 January 2012

Academic Editor: Edward Andrew Payzant

Copyright © 2012 Sheng-Rui Jian and Jenh-Yih Juang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [12 citations]

The following is the list of published articles that have cited the current article.

  • Sheng-Rui Jian, Shin-An Ku, Chih-Wei Luo, and Jenh-Yih Juang, “Nanoindentation of GaSe thin films,” Nanoscale Research Letters, vol. 7, 2012. View at Publisher · View at Google Scholar
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  • Sheng-Rui Jian, Ya-Yun Lin, and Wen-Cheng Ke, “Effects of Thermal Annealing on the Structural, Electrical and Mechanical Properties of Al-Doped ZnO Thin Films Deposited by Radio-Frequency Magnetron Sputtering,” Science Of Advanced Materials, vol. 5, no. 1, pp. 7–13, 2013. View at Publisher · View at Google Scholar
  • Chih-Yen Huang, Pei-Ju Hsieh, I-Chen Chen, Wen-Cheng Ke, and Ping-Feng Yang, “Nanoindentation of Mg-doped AlGaN thin films,” Journal of Alloys and Compounds, vol. 593, pp. 220–223, 2014. View at Publisher · View at Google Scholar
  • Sheng-Rui Jian, and Ya-Yun Lin, “Berkovich nanoindentation-induced dislocation energetics and pop-in effects in ZnSe thin films,” Journal of Alloys and Compounds, vol. 590, pp. 153–156, 2014. View at Publisher · View at Google Scholar
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  • Chiu, Yen, Chiang, Chen, Jian, Wang, and Kao, “Mechanical properties and fracture toughness of AlN thin films deposited using helicon sputtering,” Nanoscience and Nanotechnology Letters, vol. 9, no. 4, pp. 562–566, 2017. View at Publisher · View at Google Scholar
  • Cristina Besleaga, Viorel Dumitru, Liliana Trinca, Adrian-Claudiu Popa, Constantin-Catalin Negrila, Łukasz Kołodziejczyk, Catalin-Romeo Luculescu, Gabriela-Cristina Ionescu, Razvan-George Ripeanu, Alina Vladescu, and George Stan, “Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure,” Nanomaterials, vol. 7, no. 11, pp. 394, 2017. View at Publisher · View at Google Scholar