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Journal of Nanomaterials
Volume 2012 (2012), Article ID 914184, 6 pages
http://dx.doi.org/10.1155/2012/914184
Research Article

Indentation-Induced Mechanical Deformation Behaviors of AlN Thin Films Deposited on c-Plane Sapphire

1Department of Materials Science and Engineering, I-Shou University, Kaohsiung 84001, Taiwan
2Department of Electrophysics, National Chiao Tung University, Hsinchu 300, Taiwan

Received 16 November 2011; Accepted 13 January 2012

Academic Editor: Edward Andrew Payzant

Copyright © 2012 Sheng-Rui Jian and Jenh-Yih Juang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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