A Metal Matrix CNTS Modified Electrode Fabricated Using Micromachining-Based Implantation Method for Improving Sensitivity and Stability

<table>The fabrication process of MCME: (1) cleaning a glass substrate, (2) forming CNT/PI composite film, (3) wet chemical etching of PI layer, (4) sputtering Cr/Cu (30/50 nm) conducting layer, (5) electroplating of the Ni film, (6) releasing the PI and peel off the Ni film.</table>

Journal of Nanomaterials

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Figure 1

Figure 1: A Metal Matrix CNTS Modified Electrode Fabricated Using Micromachining-Based Implantation Method for Improving Sensitivity and Stability 