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Journal of Nanomaterials
Volume 2013 (2013), Article ID 123256, 11 pages
Research Article

3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles

1Department of Food and Process Engineering, Faculty of Engineering, University Putra Malaysia, 43400 Serdang, Selangor, Malaysia
2Department of Chemical and Environmental Engineering, Faculty of Engineering, University Putra Malaysia, 43400 Serdang, Selangor, Malaysia
3Advanced Materials and Nanotechnology Laboratory, Institute of Advanced Technology, University Putra Malaysia, 43400 Serdang, Selangor, Malaysia

Received 7 June 2013; Accepted 2 September 2013

Academic Editor: Huogen Yu

Copyright © 2013 Siti Hajar Othman et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


This paper presents the 3-dimensional (3D) computational fluid dynamics (CFD) simulation study of metal organic chemical vapor deposition (MOCVD) producing photocatalytic titanium dioxide (TiO2) nanoparticles. It aims to provide better understanding of the MOCVD synthesis system especially of deposition process of TiO2 nanoparticles as well as fluid dynamics inside the reactor. The simulated model predicts temperature, velocity, gas streamline, mass fraction of reactants and products, kinetic rate of reaction, and surface deposition rate profiles. It was found that temperature distribution, flow pattern, and thermophoretic force considerably affected the deposition behavior of TiO2 nanoparticles. Good mixing of nitrogen (N2) carrier gas and oxygen (O2) feed gas is important to ensure uniform deposition and the quality of the nanoparticles produced. Simulation results are verified by experiment where possible due to limited available experimental data. Good agreement between experimental and simulation results supports the reliability of simulation work.