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Journal of Nanomaterials
Volume 2013 (2013), Article ID 154179, 7 pages
Research Article

Nanoindentation and Adhesion Properties of Ta Thin Films

Department of Materials Science and Engineering, I-Shou University, Kaohsiung 840, Taiwan

Received 1 February 2013; Revised 6 March 2013; Accepted 14 March 2013

Academic Editor: Ugur Serincan

Copyright © 2013 Yuan-Tsung Chen. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Yuan-Tsung Chen, “Nanoindentation and Adhesion Properties of Ta Thin Films,” Journal of Nanomaterials, vol. 2013, Article ID 154179, 7 pages, 2013. doi:10.1155/2013/154179