Review Article

Technical Solutions to Mitigate Reliability Challenges due to Technology Scaling of Charge Storage NVM

Figure 7

(a) shift of various tunnel oxynitrides as a function of P/E cycle counts [68]; (b) memory window (MW) after 106 P/E cycle as a function of tunnel oxide thickness [68].
195325.fig.007a
(a)
195325.fig.007b
(b)