Review Article
ZnO-Based Transparent Conductive Thin Films: Doping, Performance, and Processing
Table 1
Properties of ZnO films with different dopants prepared by PLD.
| | Dopants | Optimum content in target (%) | Thickness (nm) | Resistivity (Ω·cm) | Transmittance (%) | Reference |
| | Al | 2 | 500 | 4.5 × 10−4 | 88% | [35] | | Ga | 5 | 200 | 8.12 × 10−4 | >90% | [22] | | In | 40 | >1000 | 4.02 × 10−4 | >85% | [36] | | F | 2 | 200 | 4.83 × 10−4 | >90% | [25] | | Si | 2 | ~150 | 6.2 × 10−4 | ~80% | [37] |
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