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Journal of Nanomaterials
Volume 2013, Article ID 245095, 8 pages
Research Article

The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films

1Department of Electrical Engineering, National Sun Yat-Sen University, No. 70, Lienhai Road, Kaohsiung 80424, Taiwan
2Department of Computer and Communication, Shu-Te University, No. 59, Hengshan Road, Yanchao District, Kaohsiung 82445, Taiwan
3Department of Electronic Engineering, De Lin Institute of Technology, No. 1, Ln. 380, Qingyun Road, Tucheng District, New Taipei 23654, Taiwan

Received 15 September 2013; Accepted 1 October 2013

Academic Editor: Liang-Wen Ji

Copyright © 2013 Ying-Chung Chen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [5 citations]

The following is the list of published articles that have cited the current article.

  • Yu-Chen Chang, Ying-Chung Chen, Kuo-Sheng Kao, Chien-Chuan Cheng, Wei-Tsai Chang, Wei-Che Shih, Shang-Huai Lin, and Jyun-Min Lin, “Deposition of AlN thin films on LiTaO3]]> substrates,” 2017 International Conference on Applied System Innovation (ICASI), pp. 846–849, . View at Publisher · View at Google Scholar
  • Wei-Che Shih, Ying-Chung Chen, Wei-Tsai Chang, Chien-Chuan Cheng, Pei-Chun Liao, and Kuo-Sheng Kao, “Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices,” Journal of Nanomaterials, vol. 2014, pp. 1–10, 2014. View at Publisher · View at Google Scholar
  • Ying-Chung Chen, Wei-Che Shih, Wei-Tsai Chang, Chun-Hung Yang, Kuo-Sheng Kao, and Chien-Chuan Cheng, “Biosensor for human IgE detection using shear-mode FBAR devices,” Nanoscale Research Letters, vol. 10, pp. 1–8, 2015. View at Publisher · View at Google Scholar
  • A. Zazerin, V. Ulianova, O. Bogdan, A. Orlov, A. Zazerin, V. Ulianova, O. Bogdan, and A. Orlov, “Sensitivity Evaluation of the Nanostructure-Enhanced BAW Mass Sensor,” 3Rd International Conference On Nanotechnologies And Biomedical Engineering, vol. 55, pp. 345–348, 2016. View at Publisher · View at Google Scholar
  • Caliendo, Mattioli, and Hamidullah, “Finite Element Modeling and Synthesis of c-axis Tilted AlN TFBAR for Liquid Sensing Applications,” Procedia Engineering, vol. 168, pp. 1032–1035, 2016. View at Publisher · View at Google Scholar