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Journal of Nanomaterials
Volume 2013, Article ID 245095, 8 pages
Research Article

The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films

1Department of Electrical Engineering, National Sun Yat-Sen University, No. 70, Lienhai Road, Kaohsiung 80424, Taiwan
2Department of Computer and Communication, Shu-Te University, No. 59, Hengshan Road, Yanchao District, Kaohsiung 82445, Taiwan
3Department of Electronic Engineering, De Lin Institute of Technology, No. 1, Ln. 380, Qingyun Road, Tucheng District, New Taipei 23654, Taiwan

Received 15 September 2013; Accepted 1 October 2013

Academic Editor: Liang-Wen Ji

Copyright © 2013 Ying-Chung Chen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [2 citations]

The following is the list of published articles that have cited the current article.

  • Wei-Che Shih, Ying-Chung Chen, Wei-Tsai Chang, Chien-Chuan Cheng, Pei-Chun Liao, and Kuo-Sheng Kao, “Design and Fabrication of Nanoscale IDTs Using Electron Beam Technology for High-Frequency SAW Devices,” Journal of Nanomaterials, vol. 2014, pp. 1–10, 2014. View at Publisher · View at Google Scholar
  • Ying-Chung Chen, Wei-Che Shih, Wei-Tsai Chang, Chun-Hung Yang, Kuo-Sheng Kao, and Chien-Chuan Cheng, “Biosensor for human IgE detection using shear-mode FBAR devices,” Nanoscale Research Letters, vol. 10, pp. 1–8, 2015. View at Publisher · View at Google Scholar