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Journal of Nanomaterials
Volume 2013, Article ID 245095, 8 pages
http://dx.doi.org/10.1155/2013/245095
Research Article

The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films

1Department of Electrical Engineering, National Sun Yat-Sen University, No. 70, Lienhai Road, Kaohsiung 80424, Taiwan
2Department of Computer and Communication, Shu-Te University, No. 59, Hengshan Road, Yanchao District, Kaohsiung 82445, Taiwan
3Department of Electronic Engineering, De Lin Institute of Technology, No. 1, Ln. 380, Qingyun Road, Tucheng District, New Taipei 23654, Taiwan

Received 15 September 2013; Accepted 1 October 2013

Academic Editor: Liang-Wen Ji

Copyright © 2013 Ying-Chung Chen et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Ying-Chung Chen, Wei-Tsai Chang, Kuo-Sheng Kao, Chun-Hung Yang, and Chien-Chuan Cheng, “The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films,” Journal of Nanomaterials, vol. 2013, Article ID 245095, 8 pages, 2013. https://doi.org/10.1155/2013/245095.