The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films

Table 1

Deposition parameters of Ti and Pt thin films.

Target	Ti (99.995%)	Pt (99.995%)
Substrate-to-target distance (mm)	50	50
Base pressure (Torr)	1×10^−6	1×10^−6
Substrate temperature (°C)	R.T.	R.T.
RF power (W)	75	175
Sputtering pressure (mTorr)	3	1
Ar (sccm)	10	10