The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films

Table 2

Deposition parameters of AlN thin films.

Target	Al (99.995%)
Substrate-to-target distance (mm)	50
Base pressure (Torr)	5×10^−7
Substrate temperature (°C)	300
RF power (W)	250
Sputtering pressure (mTorr)	5, 15
N2/N2 + Ar	46%