One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers

<table>((a)–(c)) The morphology of nanostructures was controlled by depositing a sacrificial layer and varying the process time. (d) Cocktail-glass-shaped nanostructures. (e) Spike-shaped nanostructures.</table>

Journal of Nanomaterials

fig4

Figure 4

Figure 4: One-Step Fabrication of Hierarchically Structured Silicon Surfaces and Modification of Their Morphologies Using Sacrificial Layers 