Research Article
The Geometry Variation of As-Grown Carbon Coils with Ni Layer Thickness and Hydrogen Plasma Pretreatment
Table 2
Experimental conditions for the deposition of carbon coils.
| | Samples | C2H2 flow rate (sccm) | H2 flow rate (sccm) | SF6 flow rate (sccm) | Total pressure (Torr) | Total deposition time (min) | C2H2 injection time (min) | H2 injection time (min) | SF6 injection time (min) | Substrate temperature (°C) |
| | A~F | 15 | 35 | 35 | 100 | 90 | 90 | 90 | 5 | 750 |
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