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Journal of Nanomaterials
Volume 2013 (2013), Article ID 530959, 8 pages
http://dx.doi.org/10.1155/2013/530959
Research Article

Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems

Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China

Received 9 October 2013; Revised 21 November 2013; Accepted 21 November 2013

Academic Editor: Myoung-Woon Moon

Copyright © 2013 Peng Guo et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Peng Guo, Peiling Ke, and Aiying Wang, “Incorporated W Roles on Microstructure and Properties of W-C:H Films by a Hybrid Linear Ion Beam Systems,” Journal of Nanomaterials, vol. 2013, Article ID 530959, 8 pages, 2013. doi:10.1155/2013/530959