Table of Contents Author Guidelines Submit a Manuscript
Journal of Nanomaterials
Volume 2013, Article ID 542737, 9 pages
http://dx.doi.org/10.1155/2013/542737
Research Article

Fabrication of Silicon Nitride Ion Sensitive Field-Effect Transistor for pH Measurement and DNA Immobilization/Hybridization

Institute of Nano Electronic Engineering (INEE), Universiti Malaysia Perlis (UniMAP), 01000 Kangar Perlis, Malaysia

Received 10 July 2013; Accepted 10 September 2013

Academic Editor: Hongchen Chen Gu

Copyright © 2013 U. Hashim et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. P. W. Atkins, Physical Chemistry, W. H. Freeman, San Fransisco, Calif, USA, 1978.
  2. W. Vonau and U. Guth, “pH monitoring: a review,” Journal of Solid State Electrochemistry, vol. 10, no. 9, pp. 746–752, 2006. View at Publisher · View at Google Scholar · View at Scopus
  3. P. Bergveld, “Development of an ion-sensitive solid state device for neurophysiological measurements,” IEEE Transactions on Biomedical Engineering, vol. 17, no. 1, pp. 70–71, 2008. View at Google Scholar · View at Scopus
  4. R. G. Kelly, “Microelectronic approaches to solid state ion selective electrodes,” Electrochimica Acta, vol. 22, no. 1, pp. 1–8, 1977. View at Publisher · View at Google Scholar · View at Scopus
  5. C. Cané, I. Gràcia, and A. Merlos, “Microtechnologies for pH ISFET chemical sensors,” Microelectronics Journal, vol. 28, no. 4, pp. 389–405, 1997. View at Google Scholar · View at Scopus
  6. T. Matsuo, M. Esashi, and H. Abe, “WP-B4 pH ISFET’s using Al2O3, Si3N4, and SiO2 gate thin films,” IEEE Transactions on Electron Devices, vol. 26, no. 11, pp. 1856–1857, 1979. View at Google Scholar
  7. H. Abe, M. Esashi, and T. Matsuo, “ISFETs using inorganic gate thin films,” IEEE Transactions on Electron Devices, vol. 26, no. 12, pp. 1939–1944, 1979. View at Google Scholar · View at Scopus
  8. M. J. Sienko and R. A. Plane, Chemistry Principles and Applications, McGraw Hill, New York, NY, USA, 1979.
  9. E. Souteyrand, J. P. Cloarec, J. R. Martin et al., “Direct detection of the hybridization of synthetic homo-oligomer DNA sequences by field effect,” Journal of Physical Chemistry B, vol. 101, no. 15, pp. 2980–2985, 1997. View at Google Scholar · View at Scopus
  10. M. J. Schöning and A. Poghossian, “Recent advances in biologically sensitive field-effect transistors (BioFETs),” Analyst, vol. 127, no. 9, pp. 1137–1151, 2002. View at Publisher · View at Google Scholar · View at Scopus
  11. T. Sakata, M. Kamahori, and Y. Miyahara, “DNA analysis chip based on field-effect transistors,” Japanese Journal of Applied Physics, vol. 44, no. 4, pp. 2854–2859, 2005. View at Publisher · View at Google Scholar · View at Scopus
  12. A. A. Velasco, “Parametric and kinetic study of silicon nitride film deposition on silicon wafer by Low Pressure Chemical Vapor Deposition (LPCVD) method,” Philippine Engineering Journal, vol. 23, no. 1, pp. 59–76, 2002. View at Google Scholar
  13. T. Matsuo and K. D. Wise, “An integrated field effect electrode for biopotential recording,” IEEE Transactions on Biomedical Engineering, vol. 21, no. 6, pp. 485–487, 1974. View at Google Scholar · View at Scopus
  14. P. Bergveld, “Thirty years of ISFETOLOGY: what happened in the past 30 years and what may happen in the next 30 years,” Sensors and Actuators B, vol. 88, no. 1, pp. 1–20, 2003. View at Publisher · View at Google Scholar · View at Scopus
  15. P. Bergveld, “ISFET, theory and practice,” in Proceedings of the IEEE Sensor Conference Toronto, pp. 1–26, 2003.
  16. V. P. Chodavarapu, A. H. Titus, and A. N. Cartwright, “CMOS ISFET microsystem for biomedical applications,” in Proceedings of the 4th IEEE Conference on Sensors, pp. 109–112, Irvine, Calif, USA, November 2005. View at Publisher · View at Google Scholar · View at Scopus
  17. J. Heitz, T. Gumpenberger, H. Kahr, and C. Romanin, “Adhesion and proliferation of human vascular cells on UV-light-modified polymers,” Biotechnology and Applied Biochemistry, vol. 39, no. 1, pp. 59–69, 2004. View at Google Scholar · View at Scopus
  18. D. E. Yates, S. Levine, and T. W. Healy, “Site-binding model of the electrical double layer at the oxide/water interface,” Journal of the Chemical Society, Faraday Transactions 1, vol. 70, pp. 1807–1818, 1974. View at Publisher · View at Google Scholar · View at Scopus
  19. L. Bousse, N. F. de Rooij, and P. Bergveld, “Operation of chemically sensitive field-effect sensors as a function of the insulator-electrolyte interface,” IEEE Transactions on Electron Devices, vol. 30, no. 10, pp. 1263–1270, 1983. View at Google Scholar · View at Scopus
  20. A. Loi, I. Manunza, and A. Bonfiglio, “Flexible, organic, ion-sensitive field-effect transistor,” Applied Physics Letters, vol. 86, no. 10, pp. 103512–103514, 2005. View at Publisher · View at Google Scholar · View at Scopus
  21. V. K. Khanna, A. Kumar, Y. K. Jain, and S. Ahmad, “Design and development of a novel high-transconductance pH-ISFET (ion-sensitive field-effect transistor)-based glucose biosensor,” International Journal of Electronics, vol. 93, no. 2, pp. 81–96, 2006. View at Publisher · View at Google Scholar · View at Scopus
  22. M. Grattarola and G. Massobrio, Bioelectronics Handbook: MOSFETS, Biosensors, and Neurons, McGraw-Hill, New York, NY, USA, 1998.
  23. G. Lucovsky, “Reaction/annealing pathways for forming ultrathin silicon nitride films for composite oxide-nitride gate dielectrics with nitrided crystalline silicon-dielectric interfaces for application in advanced complementary metal-oxide-semiconductor devices,” Journal of Vacuum Science and Technology A, vol. 17, no. 4, pp. 1340–1351, 1999. View at Google Scholar · View at Scopus
  24. P. A. E. Piunno, J. Watterson, C. C. Wust, and U. J. Krull, “Considerations for the quantitative transduction of hybridization of immobilized DNA,” Analytica Chimica Acta, vol. 400, no. 1–3, pp. 73–89, 1999. View at Publisher · View at Google Scholar · View at Scopus
  25. J. Fritz, E. B. Cooper, S. Gaudet, P. K. Sorger, and S. R. Manalis, “Electronic detection of DNA by its intrinsic molecular charge,” Proceedings of the National Academy of Sciences of the United States of America, vol. 99, no. 22, pp. 14142–14146, 2002. View at Publisher · View at Google Scholar · View at Scopus