Directed Self-Assembly of Block Copolymer for Bit Patterned Media with Areal Density of 1.5 Teradot/Inch2 and Beyond
Figure 13
SEM images of various 3.2 Td/in2 unguided patterns for high-density BPM patterning demonstration. (a) SEM image of an unguided sphere-forming PS-b-PDMS BCP pattern. (b) 3 nm thick Cr dots as hard mask. (c) 12 nm thick carbon dots as hard mask. (d) 8 nm thick CoCrPt alloy dots. The inset is a cross-sectional TEM image. (e) Magnetic loop with coercivity kOe.
