Directed Self-Assembly of Block Copolymer for Bit Patterned Media with Areal Density of 1.5 Teradot/Inch2 and Beyond
Figure 5
SEM images of various sphere-forming PS-b-PDMS BCP patterns at different densities. (a) , 1.3 Td/in2. (b) , 1.5 Td/in2. (c) , 2.0 Td/in2. (d) , 2.4 Td/in2. (e) , 3.2 Td/in2. (f) , 5.0 Td/in2. All PDMS patterns shown in (a), (b), (c), and (e) are guided BCP patterns, whereas (d) and (f) are unguided BCP patterns. All BCP samples were done using thermal annealing process.
