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Journal of Nanomaterials
Volume 2013 (2013), Article ID 621531, 10 pages
Review Article

Advances in Optical and Magnetooptical Scatterometry of Periodically Ordered Nanostructured Arrays

Institute of Physics, Faculty of Mathematics and Physics, Charles University, Ke Karlovu 5, 12116 Prague, Czech Republic

Received 26 November 2012; Accepted 27 December 2012

Academic Editor: Yue Li

Copyright © 2013 Martin Veis and Roman Antos. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [3 citations]

The following is the list of published articles that have cited the current article.

  • M. Helsen, A. Gangwar, A. Vansteenkiste, and B. Van Waeyenberge, “Magneto-optical spectrum analyzer,” Review of Scientific Instruments, vol. 85, no. 8, pp. 083902, 2014. View at Publisher · View at Google Scholar
  • Yen-Min Lee, Jia-Han Li, Fu-Min Wang, Hsin-Hung Cheng, Yu-Tian Shen, Kuen-Yu Tsai, Jason J Shieh, and Alek C Chen, “Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises,” Journal of Optics, vol. 16, no. 6, pp. 065706, 2014. View at Publisher · View at Google Scholar
  • Károly Marák, “Characterization of the inverse problem in critical dimension measurement of diffraction gratings,” Periodica Polytechnica, Electrical Engineering, vol. 60, no. 3, pp. 178–186, 2016. View at Publisher · View at Google Scholar