Effect of Structure, Composition, and Micromorphology on the Hydrophobic Property of F-DLC Film

Table 1

Variation of peak position, width, and 𝐼_𝐷/𝐼_𝐺 ratio obtained by Raman spectroscopy.

Gas flow ratio 𝑅	𝐷 band		𝐺 band		𝐼𝐷/𝐼𝐺
	Position 𝜔𝐷 (cm^−1)	Width	Position 𝜔𝐺 (cm^−1)	Width
0.25	1389.6	251.7	1572.5	102.8	1.70
0.50	1401.8	318.4	1574.5	101.5	4.19
0.75	1407.1	356.3	1574.6	107.7	5.17