Structure and Properties of Nanostructured (Ti-Hf-Zr-V-Nb)N Coatings

Figure 5

(a) The XRD spectra for a coating fabricated at 𝑃_N=0.7 Pa and 𝑈_𝑏=−200 V (sample 512): (1) before annealing; (2) after thermal annealing. (b) The XRD spectra of a coating fabricated at 𝑃_N=0.2 Pa and 𝑈_𝑏=−50 V (sample 510) before annealing (1) and after thermal annealing at 873 K (2).

(a)

(b)