Journal of Nanomaterials / 2013 / Article / Fig 2

Research Article

Fabrication of Light Extraction Efficiency of Organic Light-Emitting Diodes with 3D Aspherical Microlens by Using Dry Etching Process

Figure 2

The procedure of the modified LIGA process which can manufacture an A-MLA with high aspect ratio (a) exposure process, (b) reflow process, (c) RIE dry etching process, and (d) PDMS mold.
797534.fig.002

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