Fabrication of Light Extraction Efficiency of Organic Light-Emitting Diodes with 3D Aspherical Microlens by Using Dry Etching Process

<table>The procedure of the modified LIGA process which can manufacture an A-MLA with high aspect ratio (a) exposure process, (b) reflow process, (c) RIE dry etching process, and (d) PDMS mold.</table>

Journal of Nanomaterials

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Figure 2: Fabrication of Light Extraction Efficiency of Organic Light-Emitting Diodes with 3D Aspherical Microlens by Using Dry Etching Process 