Fabrication of Light Extraction Efficiency of Organic Light-Emitting Diodes with 3D Aspherical Microlens by Using Dry Etching Process

Table 1

The parameters of RIE.

No.	Pressure (mTorr)	O2 (sccm)	Time (minutes)	Diameter (μm)	Height (μm)	Aspect ratio
1	25	10	10	36.58	16.81	0.45
2	25	5	10	31.76	21.83	0.68
3	25	1	10	30.83	22.57	0.73
4	25	0	10	30.65	22.80	0.74