Sub-15 nm Silicon Lines Fabrication via PS-b-PDMS Block Copolymer Lithography
Figure 3
Top-down SEM images of PS-b-PDMS on 4′′ wafer. (a) Top-down SEM image of PS-b-PDMS after PDMS removal; inset shows PS-b-PDMS before removal of upper PDMS with no nanopattern visible. (b) Low resolution and (c) high resolution images of oxidised PDMS cylinders.
