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Journal of Nanomaterials
Volume 2013, Article ID 832401, 12 pages
Research Article

Application of Ferrite Nanomaterial in RF On-Chip Inductors

1Institute of Microelectronics, Tsinghua University, Beijing 100084, China
2National Laboratory for Information and Science Technology, Tsinghua University, Beijing 100084, China
3Department of Electrical Engineering, University of California, Riverside, CA 92521, USA

Received 26 April 2013; Accepted 23 May 2013

Academic Editor: Yang Chai

Copyright © 2013 Hua-Lin Cai et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Several kinds of ferrite-integrated on-chip inductors are presented. Ferrite nanomaterial applied in RF on-chip inductors is prepared and analyzed to show the properties of high permeability, high ferromagnetic resonance frequency, high resistivity, and low loss, which has the potential that will improve the performance of RF on-chip inductors. Simulations of different coil and ferrite nanomaterial parameters, inductor structures, and surrounding structures are also conducted to achieve the trend of gains of inductance and quality factor of on-chip inductors. By integrating the prepared ferrite magnetic nanomaterial to the on-chip inductors with different structures, the measurement performances show an obvious improvement even in GHz frequency range. In addition, the studies of CMOS compatible process to integrate the nanomaterial promote the widespread application of magnetic nanomaterial in RF on-chip inductors.