Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness

Table 2

Hardness, modulus of elasticity, percentage elastic recovery of single-layer, and multilayer by nanoindentation.

Film	No. of layers (substrate-SS304)	Hardness (GPa)	Modulus of elasticity (GPa)	Percentage elastic recovery (%)
A	1	31.7	266.57	59.8
B	1	9.629	115.745	55.0
C (AB)	2	25.978	266.138	52.6
D (BA)	2	36.43	339.387	52.3
E (ABA)	3	36.394	317.236	61.9