Enhanced Visible Light Absorption by 3C-SiC Nanoparticles Embedded in Si Solar Cells by Plasma-Enhanced Chemical Vapor Deposition
Figure 5
The schematic diagrams of the plasma-enhanced growth of Si nano-crystallites on the sites of SiC nanoparticle seeds from the nanofurnace mechanism for (a) the microtextured Si samples, (b) the spraying process of SiC nanoparticles, (c) Si deposition by PECVD in a mixed SiH4 and H2 gas ambient, (d) Si surface melting on the SiC nanoparticles, (e) Si seed nucleation, and (f) the formation of Si nanocrystallites. The plasma uniformly heats the Si surface, but the local SiC nanoparticle sites can be strongly heated by plasma absorption, resulting in interfacial melting of the Si neighbor due to nanofurnaces.
