Improving the Microstructure and Electrical Properties of Aluminum Induced Polysilicon Thin Films Using Silicon Nitride Capping Layer
Figure 4
Curve fitting of the Raman spectra for the poly-Si thin films using AIC with the capping layer, wherein the Raman spectra can be divided into three spectra for a-silicon (480 cm−1), polysilicon (500 cm−1) and single-silicon (521 cm−1).
