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Journal of Nanomaterials
Volume 2014, Article ID 439212, 6 pages
http://dx.doi.org/10.1155/2014/439212
Research Article

Simple, Fast, and Cost-Effective Fabrication of Wafer-Scale Nanohole Arrays on Silicon for Antireflection

1College of Mechatronics and Automation, National University of Defense Technology, Changsha 410073, China
2State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050, China

Received 12 February 2014; Accepted 21 April 2014; Published 15 June 2014

Academic Editor: Jie-Fang Zhu

Copyright © 2014 Di Di et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Di Di, Xuezhong Wu, Peitao Dong, et al., “Simple, Fast, and Cost-Effective Fabrication of Wafer-Scale Nanohole Arrays on Silicon for Antireflection,” Journal of Nanomaterials, vol. 2014, Article ID 439212, 6 pages, 2014. https://doi.org/10.1155/2014/439212.