Agglomeration and Dendritic Growth of Cu/Ti/Si Thin Film

Table 1

Rq and the parameters of the multifractal spectra of the samples.

	Rq (nm)	𝛼min	𝛼max	Δ𝛼	𝑓(𝛼min)	𝑓(𝛼max)	Δ𝑓=𝑓(𝛼min)−𝑓(𝛼max)
500°C	8.68	1.8147	2.1793	0.3646	0.3604	−0.0781	0.4386
600°C	10.6	1.8812	2.2658	0.3846	1.2161	0.0777	1.1383
700°C	87.1	1.7828	2.3919	0.6090	1.4912	0.0717	1.4195
800°C	92.9	1.7534	2.6913	0.9379	0.9702	0.3707	0.5995