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Journal of Nanomaterials
Volume 2014, Article ID 609482, 9 pages
Research Article

Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering

1Department of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok 10140, Thailand
2Vacuum Technology and Thin Film Research Laboratory, Department of Physics, Faculty of Science, Burapha University, Chonburi 20131, Thailand
3Thailand Center of Excellence in Physics, CHE, Ministry of Education, Bangkok 10400, Thailand

Received 4 April 2014; Accepted 25 June 2014; Published 14 July 2014

Academic Editor: Margarida Amaral

Copyright © 2014 Chutima Paksunchai et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Nanostructured TiCrN films were grown on Si (100) wafers by reactive DC unbalanced magnetron cosputtering technique without external heating and voltage biasing to the substrates. The effects of Ti sputtering current on the chemical composition, chemical state, electronic structure, crystal structure, and morphology of the TiCrN films were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), and field emission scanning electron microscopy (FE-SEM), respectively. The results showed that all prepared films were formed as an understoichiometric (Ti, Cr)N solid solution with the fcc B1 type phase. The films exhibited a nanostructure with a crystallite size of less than 14 nm. The deconvolution of XPS spectra revealed the chemical bonding between Ti, Cr, N, and O elements. The addition of Ti contents led to the decrease of valence electrons filled in the d conduction bands which result in the change of binding energy of electrons in core levels. The roughness of the films was found to increase with increasing . The cross-sectional morphology of the films showed columnar structure with dome tops.