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Journal of Nanomaterials
Volume 2014, Article ID 609482, 9 pages
http://dx.doi.org/10.1155/2014/609482
Research Article

Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering

1Department of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok 10140, Thailand
2Vacuum Technology and Thin Film Research Laboratory, Department of Physics, Faculty of Science, Burapha University, Chonburi 20131, Thailand
3Thailand Center of Excellence in Physics, CHE, Ministry of Education, Bangkok 10400, Thailand

Received 4 April 2014; Accepted 25 June 2014; Published 14 July 2014

Academic Editor: Margarida Amaral

Copyright © 2014 Chutima Paksunchai et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. P. Roquiny, F. Bodart, and G. Terwagne, “Colour control of titanium nitride coatings produced by reactive magnetron sputtering at temperature less than 100°C,” Surface and Coatings Technology, vol. 116–119, pp. 278–283, 1999. View at Publisher · View at Google Scholar · View at Scopus
  2. Y. Shi, S. Long, L. Fang, F. Pan, and H. Liao, “Effects of N2 content and thickness on CrNx coatings on Mg alloy by the planar DC reactive magnetron sputtering,” Applied Surface Science, vol. 255, no. 13-14, pp. 6515–6524, 2009. View at Publisher · View at Google Scholar · View at Scopus
  3. A. Rizzo, M. A. Signore, L. Mirenghi, and E. Serra, “Properties of ZrNx films with x > 1 deposited by reactive radiofrequency magnetron sputtering,” Thin Solid Films, vol. 515, no. 4, pp. 1307–1313, 2006. View at Publisher · View at Google Scholar · View at Scopus
  4. B. Navinšek, P. Panjan, and A. Cvelbar, “Characterization of low temperature CrN and TiN (PVD) hard coatings,” Surface and Coatings Technology, vol. 74-75, no. 1, pp. 155–161, 1995. View at Publisher · View at Google Scholar · View at Scopus
  5. H. S. Choi, D. H. Han, W. H. Hong, and J. J. Lee, “(Titanium, chromium) nitride coatings for bipolar plate of polymer electrolyte membrane fuel cell,” Journal of Power Sources, vol. 189, no. 2, pp. 966–971, 2009. View at Publisher · View at Google Scholar · View at Scopus
  6. D. H. Jung, H. S. Park, H. D. Na, J. W. Lim, J. J. Lee, and J. H. Joo, “Mechanical properties of (Ti,Cr)N coatings deposited by inductively coupled plasma assisted direct current magnetron sputtering,” Surface and Coatings Technology, vol. 169-170, pp. 424–427, 2003. View at Publisher · View at Google Scholar · View at Scopus
  7. J. G. Han, H. S. Myung, H. M. Lee, and L. R. Shaginyan, “Microstructure and mechanical properties of Ti-Ag-N and Ti-Cr-N superhard nanostructured coatings,” Surface & Coatings Technology, vol. 174-175, pp. 738–743, 2003. View at Publisher · View at Google Scholar · View at Scopus
  8. J. H. Hsieh, W. H. Zhang, C. Li, and C. Q. Sun, “Characterization of (Tix Cr0.6−x) N0.4 coatings and their tribological behaviors against an epoxy molding compound,” Surface and Coatings Technology, vol. 146-147, pp. 331–337, 2001. View at Publisher · View at Google Scholar · View at Scopus
  9. P. Hones, R. Sanjinés, and F. Lévy, “Sputter deposited chromium nitride based ternary compounds for hard coatings,” Thin Solid Films, vol. 332, no. 1-2, pp. 240–246, 1998. View at Publisher · View at Google Scholar · View at Scopus
  10. Y. Otani and S. Hofmann, “High temperature oxidation behaviour of (Ti1-xCrx)N coatings,” Thin Solid Films, vol. 287, no. 1-2, pp. 188–192, 1996. View at Publisher · View at Google Scholar · View at Scopus
  11. Z. G. Zhang, O. Rapaud, N. Bonasso, D. Mercs, C. Dong, and C. Coddet, “Microstructures and corrosion behaviors of Zr modified CrN coatings deposited by DC magnetron sputtering,” Vacuum, vol. 82, no. 11, pp. 1332–1336, 2008. View at Publisher · View at Google Scholar · View at Scopus
  12. K. Chu, P. W. Shum, and Y. G. Shen, “Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering,” Materials Science and Engineering B, vol. 131, no. 1–3, pp. 62–71, 2006. View at Publisher · View at Google Scholar · View at Scopus
  13. L. Wang, G. Zhang, R. J. K. Wood, S. C. Wang, and Q. Xue, “Fabrication of CrAlN nanocomposite films with high hardness and excellent anti-wear performance for gear application,” Surface and Coatings Technology, vol. 204, no. 21-22, pp. 3517–3524, 2010. View at Publisher · View at Google Scholar · View at Scopus
  14. D. B. Lee, Y. C. Lee, and S. C. Kwon, “High temperature oxidation of TiCrN coatings deposited on a steel substrate by ion plating,” Surface and Coatings Technology, vol. 141, no. 2-3, pp. 232–239, 2001. View at Publisher · View at Google Scholar · View at Scopus
  15. S. M. Aouadi, K. C. Wong, K. A. R. Mitchell et al., “Characterization of titanium chromium nitride nanocomposite protective coatings,” Applied Surface Science, vol. 229, no. 1–4, pp. 387–394, 2004. View at Publisher · View at Google Scholar · View at Scopus
  16. J. J. Nainaparampil, J. S. Zabinski, and A. Korenyi-Both, “Formation and characterization of multiphase film properties of (Ti-Cr)N formed by cathodic arc deposition,” Thin Solid Films, vol. 333, no. 1-2, pp. 88–94, 1998. View at Publisher · View at Google Scholar · View at Scopus
  17. J. Vetter, H. J. Scholl, and O. Knotek, “(TiCr)N coatings deposited by cathodic vacuum arc evaporation,” Surface and Coatings Technology, vol. 74-75, no. 1, pp. 286–291, 1995. View at Publisher · View at Google Scholar · View at Scopus
  18. K. H. Lee, C. H. Park, Y. S. Yoon, and J. J. Lee, “Structure and properties of (Ti1-xCrx)N coatings produced by the ion-plating method,” Thin Solid Films, vol. 385, no. 1-2, pp. 167–173, 2001. View at Publisher · View at Google Scholar · View at Scopus
  19. K. H. Lee, C. H. Park, Y. S. Yoon, H. A. Jehn, and J. J. Lee, “Wear and corrosion properties of (Ti1-xCrx) N coatings produced by the ion-plating method,” Surface and Coatings Technology, vol. 142–144, pp. 971–977, 2001. View at Publisher · View at Google Scholar · View at Scopus
  20. V. M. Vishnyakov, V. I. Bachurin, K. F. Minnebaev et al., “Ion assisted deposition of titanium chromium nitride,” Thin Solid Films, vol. 497, no. 1-2, pp. 189–195, 2006. View at Publisher · View at Google Scholar · View at Scopus
  21. http://webbook.nist.gov.
  22. A. Cavaleiro, B. Trindade, and M. T. Vieira, “The influence of the addition of a third element on the structure and mechanical properties of transition-metal-based nanostructured hard films: part I-nitrides,” in Nanostructured Coatings, A. Cavaleiro and J. T. M. de Hosson, Eds., Springer, New York, NY, USA, 2006. View at Google Scholar
  23. I. Bertóti, “Characterization of nitride coatings by XPS,” Surface and Coatings Technology, vol. 151-152, pp. 194–203, 2002. View at Publisher · View at Google Scholar · View at Scopus
  24. http://srdata.nist.gov/xps/ElmComposition.aspx.
  25. P. van der Heide, X-Ray Photoelectron Spectroscopy: An Introduction to Principles and Practices, John Wiley & Sons, Hoboken, NJ, USA, 2011.
  26. D. G. Sangiovanni, V. Chirita, and L. Hultman, “Electronic mechanism for toughness enhancement in TixM1-xN (M=Mo and W),” Physical Review B, vol. 81, no. 10, Article ID 104107, 2010. View at Publisher · View at Google Scholar · View at Scopus
  27. F. Tian, J. D'Arcy-Gall, T.-Y. Lee et al., “Epitaxial Ti1-xWxN alloys grown on MgO(001) by ultrahigh vacuum reactive magnetron sputtering: Electronic properties and long-range cation ordering,” Journal of Vacuum Science and Technology A, vol. 21, no. 1, pp. 140–146, 2003. View at Publisher · View at Google Scholar · View at Scopus
  28. G. Kim, B. Kim, S. Lee, and J. Hahn, “Structure and mechanical properties of Cr-Zr-N films synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources,” Surface and Coatings Technology, vol. 200, no. 5-6, pp. 1669–1675, 2005. View at Publisher · View at Google Scholar · View at Scopus
  29. W. D. Callister Jr. and D. G. Rethwisch, Material Science and Engineering: An Introduction, John Wiley & Sons, Hoboken, NJ, USA, 8th edition, 2010.
  30. J. E. Greene, “Thin film nucleation, growth, and microstructural evolution: an atomic scale view,” in Handbook of Deposition Technologies for Films and Coatings, P. M. Martin, Ed., William Andrew, New York, NY, USA, 3rd edition, 2010. View at Google Scholar
  31. D. M. Mattox, Handbook of Physical Vapor Deposition (PVD) Processing, William Andrew, Oxford, UK, 2nd edition, 2010.