Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td align="left" rowspan="2"><svg height="15.25" id="M37" style="vertical-align:-3.13504pt" version="1.1" viewbox="0 0 17.525 15.25" width="17.525" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg> (A)</td><td align="center" colspan="3">Binding energy (eV)</td></tr><tr class="thead"><td align="center">Ti 2<svg height="14.5375" id="M38" style="vertical-align:-3.28296pt" version="1.1" viewbox="0 0 25.975 14.5375" width="25.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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t38.5 134q0 78 -38.5 123t-95.5 45q-45 0 -100 -43z" id="x70"></path></g>
<g transform="matrix(.012,-0,0,-.012,8.975,12.537)"><path d="M285 378v-2q65 -13 102 -54.5t37 -97.5q0 -57 -30.5 -104.5t-74 -75t-85.5 -42t-72 -14.5q-31 0 -59.5 11t-40.5 23q-19 18 -16 36q1 16 23 33q13 10 24 0q58 -51 124 -51q55 0 88 40t33 112q0 64 -39 96.5t-88 32.5q-29 0 -64 -11l-6 29q77 25 118 57.5t41 84.5
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</svg></td><td align="center">Cr 2<svg height="14.5375" id="M39" style="vertical-align:-3.28296pt" version="1.1" viewbox="0 0 25.975 14.5375" width="25.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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<g transform="matrix(.012,-0,0,-.012,8.975,12.537)"><path d="M285 378v-2q65 -13 102 -54.5t37 -97.5q0 -57 -30.5 -104.5t-74 -75t-85.5 -42t-72 -14.5q-31 0 -59.5 11t-40.5 23q-19 18 -16 36q1 16 23 33q13 10 24 0q58 -51 124 -51q55 0 88 40t33 112q0 64 -39 96.5t-88 32.5q-29 0 -64 -11l-6 29q77 25 118 57.5t41 84.5
q0 45 -26.5 69.5t-68.5 24.5q-67 0 -120 -79l-20 20l43 63q51 56 127 56h1q66 0 107 -37t41 -95q0 -42 -31 -71q-22 -23 -68 -54z" id="x33"></path></g><g transform="matrix(.012,-0,0,-.012,14.686,12.537)"><path d="M368 703l-264 -866h-60l265 866h59z" id="x2F"></path></g><g transform="matrix(.012,-0,0,-.012,19.589,12.537)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g>
</svg></td><td align="center">N 1s</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td align="left">0.4</td><td align="center">456.0</td><td align="center">574.9</td><td align="center">397.0</td></tr><tr><td align="left">0.6</td><td align="center">456.1</td><td align="center">575.0</td><td align="center">397.1</td></tr><tr><td align="left">0.8</td><td align="center">456.0</td><td align="center">575.2</td><td align="center">397.2</td></tr><tr><td align="left">1.0</td><td align="center">455.9</td><td align="center">575.3</td><td align="center">397.4</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Binding energies of Ti 2<svg height="14.5375" id="M35" style="vertical-align:-3.28296pt" version="1.1" viewbox="0 0 25.975 14.5375" width="25.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,7.863)"><path d="M169 380l92 53q26 16 49 16q80 0 128.5 -56t48.5 -133q0 -108 -72.5 -180.5t-176.5 -91.5q-38 1 -69 18v-131q0 -57 13 -70t71 -18v-27h-236v27q49 5 61 17t12 61v452q0 48 -9.5 58.5t-56.5 16.5v24q66 11 145 43v-79zM169 346v-270q37 -39 94 -39q63 0 101.5 50
t38.5 134q0 78 -38.5 123t-95.5 45q-45 0 -100 -43z" id="x70"></path></g>
<g transform="matrix(.012,-0,0,-.012,8.975,12.537)"><path d="M285 378v-2q65 -13 102 -54.5t37 -97.5q0 -57 -30.5 -104.5t-74 -75t-85.5 -42t-72 -14.5q-31 0 -59.5 11t-40.5 23q-19 18 -16 36q1 16 23 33q13 10 24 0q58 -51 124 -51q55 0 88 40t33 112q0 64 -39 96.5t-88 32.5q-29 0 -64 -11l-6 29q77 25 118 57.5t41 84.5
q0 45 -26.5 69.5t-68.5 24.5q-67 0 -120 -79l-20 20l43 63q51 56 127 56h1q66 0 107 -37t41 -95q0 -42 -31 -71q-22 -23 -68 -54z" id="x33"></path></g><g transform="matrix(.012,-0,0,-.012,14.686,12.537)"><path d="M368 703l-264 -866h-60l265 866h59z" id="x2F"></path></g><g transform="matrix(.012,-0,0,-.012,19.589,12.537)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g>
</svg>, Cr 2<svg height="14.5375" id="M36" style="vertical-align:-3.28296pt" version="1.1" viewbox="0 0 25.975 14.5375" width="25.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,7.863)"><path d="M169 380l92 53q26 16 49 16q80 0 128.5 -56t48.5 -133q0 -108 -72.5 -180.5t-176.5 -91.5q-38 1 -69 18v-131q0 -57 13 -70t71 -18v-27h-236v27q49 5 61 17t12 61v452q0 48 -9.5 58.5t-56.5 16.5v24q66 11 145 43v-79zM169 346v-270q37 -39 94 -39q63 0 101.5 50
t38.5 134q0 78 -38.5 123t-95.5 45q-45 0 -100 -43z" id="x70"></path></g>
<g transform="matrix(.012,-0,0,-.012,8.975,12.537)"><path d="M285 378v-2q65 -13 102 -54.5t37 -97.5q0 -57 -30.5 -104.5t-74 -75t-85.5 -42t-72 -14.5q-31 0 -59.5 11t-40.5 23q-19 18 -16 36q1 16 23 33q13 10 24 0q58 -51 124 -51q55 0 88 40t33 112q0 64 -39 96.5t-88 32.5q-29 0 -64 -11l-6 29q77 25 118 57.5t41 84.5
q0 45 -26.5 69.5t-68.5 24.5q-67 0 -120 -79l-20 20l43 63q51 56 127 56h1q66 0 107 -37t41 -95q0 -42 -31 -71q-22 -23 -68 -54z" id="x33"></path></g><g transform="matrix(.012,-0,0,-.012,14.686,12.537)"><path d="M368 703l-264 -866h-60l265 866h59z" id="x2F"></path></g><g transform="matrix(.012,-0,0,-.012,19.589,12.537)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g>
</svg>, and N 1s peaks of the TiCrN films.

Journal of Nanomaterials

tab3

Table 3

Table 3: Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Cosputtering 