Thermal Effect on the Structural, Electrical, and Optical  Properties of In-Line Sputtered Aluminum Doped Zinc Oxide  Films Explored with Thermal Desorption Spectroscopy

<table>The X-ray diffraction spectra of the AZO films deposited at room temperature (RT), 100°C, and 200°C before and after measuring TDS.</table>

Journal of Nanomaterials

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Figure 2

Figure 2: Thermal Effect on the Structural, Electrical, and Optical  Properties of In-Line Sputtered Aluminum Doped Zinc Oxide  Films Explored with Thermal Desorption Spectroscopy 

Figure 2 | Thermal Effect on the Structural, Electrical, and Optical  Properties of In-Line Sputtered Aluminum Doped Zinc Oxide  Films Explored with Thermal Desorption Spectroscopy 