Research Article

Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy

Figure 4

SEM micrographs of the AZO films deposited at 100°C (a) before and (b) after measuring TDS.
690498.fig.004a
(a)
690498.fig.004b
(b)