Research Article
Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy
Table 1
The (002) peak location and full width at half maximum of X-ray diffraction spectra of the AZO films deposited at room temperature (RT), 100°C, and 200°C before and after measuring TDS.
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